Gettering and Defect Engineering in Semiconductor Technology (GADEST 2019)
نویسندگان
چکیده
منابع مشابه
Main defect reactions behind phosphorus diffusion gettering of iron
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ژورنال
عنوان ژورنال: physica status solidi (a)
سال: 2019
ISSN: 1862-6300,1862-6319
DOI: 10.1002/pssa.201900679